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A flexibly programmable spin coater is available for homogeneous coating in a cleanroom atmosphere:

  • Spin Coater: Cee 300 X (Brewer Science)
  • Speed, acceleration, spin duration variable
  • Substrate: rigid or flexible
  • Substrate size: 9 to 450 mm
  • Speed: max. 8000 rpm
  • Layer thicknesses between 5 nm and 1 µm can be realised