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Energy dispersive X-ray microdomain analysis

EDX analyser Quantax-400, Bruker AXS

For material identification of microscopic samples, energy-dispersive X-ray micro-range analysis (EDX) is used in the SEM to detect elements or their distribution. The method allows the characterisation and assignment of materials and structures and is used for R&D work, quality assurance as well as damage analysis and environmental analysis in micro areas.


Standard-free elemental analysis, qualitative and quantitative

Detector:X-Flash®- 5010, nitrogen-free (SDD)
Energy resolution :129 eV (MnKα, 100.000 cps)
Detection range: 0,1-100 Mass %
Active area:10 mm2
Slew window: Detection range boron (5) to americium (95)
Lateral resolution:                            1-3 µm (element- and matrix-dependent)
Specimen properties:flat or structured but vacuum resistant, metallic
and non-metallic materials
Specimen thickness: max. 25 mm, sample diameter: max. 50 mm

Application examples

  • Examination of contaminants and residues (e.g. filter residue)
  • Analytical detection of asbestos in various building materials (asbestos cement products, heating installations, sprayed plaster, cardboard, fabric)
  • Analytical detection of KMF (heat and sound insulation materials)
  • Particle analysis for material identification (e.g. foreign particles in building components)
  • Control of cleaning processes (e.g. detection of impurities)