EDX analyser Quantax-400, Bruker AXS
For material identification of microscopic samples, energy-dispersive X-ray micro-range analysis (EDX) is used in the SEM to detect elements or their distribution. The method allows the characterisation and assignment of materials and structures and is used for R&D work, quality assurance as well as damage analysis and environmental analysis in micro areas.
Specification
Standard-free elemental analysis, qualitative and quantitative
| Detector: | X-Flash®- 5010, nitrogen-free (SDD) | 
| Energy resolution : | 129 eV (MnKα, 100.000 cps) | 
| Detection range: | 0,1-100 Mass % | 
| Active area: | 10 mm2 | 
| Slew window: | Detection range boron (5) to americium (95) | 
| Lateral resolution: | 1-3 µm (element- and matrix-dependent) | 
| Specimen properties: | flat or structured but vacuum resistant, metallic and non-metallic materials  | 
| Specimen thickness: | max. 25 mm, sample diameter: max. 50 mm | 
Application examples
- Examination of contaminants and residues (e.g. filter residue)
 - Analytical detection of asbestos in various building materials (asbestos cement products, heating installations, sprayed plaster, cardboard, fabric)
 - Analytical detection of KMF (heat and sound insulation materials)
 - Particle analysis for material identification (e.g. foreign particles in building components)
 - Control of cleaning processes (e.g. detection of impurities)